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NanoFab Equipment Management Operation (NEMO) Tutorial

This tutorial is designed to help users learn how to use the  NanoFab Equipment Management Operation (NEMO) system.

Equipment Scheduling Using NEMO



I. Accessing NEMO

NanoFab Internal and External Users will be able to access NEMO from NanoFab tool workstations located in the labs. On the NEMO login screen enter in your NEMO username and password and press "OK" to complete the authentication process and access NEMO. Once the authentication is complete you will be taken to the NEMO homepage.

If you are a NIST employee or associate, you can have access to NEMO from your NIST office network computer workstations as well. In order to access NEMO from your NIST office network computer workstations, you will need to launch a web browser (either Internet Explorer or Mozilla Firefox) and enter https://nemo.nist.gov into the web browser’s address bar. This will launch the NEMO login screen. On the NEMO login screen enter in your NEMO username and password and press "OK" to complete the authentication process and access NEMO. Once the authentication is complete you will be taken to the NEMO homepage.

If you do not have a NEMO username and password or have forgotten this information, please contact the NanoFab User Office.

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II. Making Reservations

To create tool reservations first locate the tool for which you would like to make a reservation. For this example we will create a tool reservation for the Profilometer 2 for July 24th, 10 am to 12 pm.  First access the Calendar screen.  From the Calendar screen, you can either click on the Metrology tool category tree to list the tools under that category to locate the Profilometer 2 or type in the tool name in the “Search for a tool” to locate the tool.  See figures 1 and 2 for examples of each.

Figure 1: Accessing the Profilometer 2 tool in the Metrology tool category tree.
Figure 1:  Accessing the Profilometer 2 tool in the Metrology tool category tree.


Figure 2:  Accessing the Profilometer 2 tool from the “Search for a tool” text box field. 
Figure 2:  Accessing the Profilometer 2 tool from the “Search for a tool” text box field.  

Once you located the Profilometer 2 tool click on the Profilometer 2 link to display the reservation calendar for this tool.  Then click and drag on the calendar screen to create your tool reservation for the Profilometer 2 for July 24th, 10 am to 12 pm.  

Figure 3: Creating tool reservation
Figure 3: Creating tool reservation.

Click on the tool reservation box to display the tool reservation. You have created a tool reservation for the Profilometer 2 on July 24th, 10 am to 12 pm. 

Figure 4:  Confirming tool reservation.
Figure 4:  Confirming tool reservation.

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III. Updating Reservations

To update tool reservations, first locate the tool reservation that you would like to update. For this example we will update the tool reservation on July 24th, 10 am to 1 pm for the Critical Point Dryer 1. We will change the tool reservation time to reserve the tool to 11 am to 1 pm. First access the Calendar screen.  From the Calendar screen, you can either click on the Specialty Tools tool category tree to list the tools under that category to locate the Critical Point Dryer 1 or type in the tool name in the “Search for a tool” to locate the tool.  See figures 5 and 6 for examples of each.  

Figure 5:  Accessing the Critical Point Dryer 1 in the Specialty Tools tool category tree.
Figure 5:  Accessing the Critical Point Dryer 1 in the Specialty Tools tool category tree.

Figure 6:  Accessing the Critical Point Dryer 1 tool from the “Search for a tool” text box field.
Figure 6:  Accessing the Critical Point Dryer 1 tool from the “Search for a tool” text box field.  

Click on the tool reservation box located on the reservation calendar on July 24th, 10 am to 1 pm, and drag the reservation box downward so the start time will be 11 am.  

Figure 7: Change tool reservation start time.
Figure 7:  Changing tool reservation start time.

Move the cursor to the bottom of the tool reservation box. Click and drag the bottom of the box upward to 1 pm on the calendar.  

Figure 8:  Changing tool reservation end time.
Figure 8:  Changing tool reservation end time.

Click on the tool reservation box to confirm your updated tool reservation. You have updated the tool reservation for the Critical Point Dryer 1 from 10 am to 1 pm to 11 am to 1 pm for July 24th.  

Figure 9:  Confirming tool reservation update.
Figure 9:  Confirming tool reservation update.

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IV. Deleting Tool Reservations

To delete tool reservations first locate the tool reservation that you would like to delete. For this example we will delete the tool reservation on July 24th, 9 am to 12 pm for the JOEL E-Beam. First access the Calendar screen.  From the Calendar screen, you can either click on the Lithography tool category tree to list the tools under that category to locate the JEOL E-beam or type in the tool name in the “Search for a tool” to locate the tool.  See figures 10 and 11 for examples of each. 

Figure 10:  Accessing the JOEL E-Beam tool in the Lithography tool category tree.
Figure 10:  Accessing the JOEL E-Beam tool in the Lithography tool category tree.

Figure 11:  Accessing the JOEL E-Beam tool from the “Search for a tool” text box field.
Figure 11:  Accessing the JOEL E-Beam tool from the “Search for a tool” text box field.  

Click on the tool reservation box located on July 24th, 9 am to 12 pm. Click on Cancel this reservation.  

Figure 12:  Cancelling tool reservation.
Figure 12:  Cancelling tool reservation.

You have deleted the tool reservation for July 24th, 9 am to 12 pm for the JEOL E-Beam.

Figure: 13 Confirming tool reservation cancellation.
Figure: 13 Confirming tool reservation cancellation.

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V. Enabling/Disabling Tools

To enable tool equipment first locate the tool that you would like to enable. For this example we will enable and disable the Ellipsometer.  First access the  screen.  From the Tool control screen, you can either click on the Metrology tool category tree to list the tools under that category to locate the Elliposmeter or type in the tool name in the “Search for a tool” to locate the tool.  See figures 14 and 15 for examples of each.   

Figure 14:  Accessing the Ellipsometer tool in the Metrology tool category tree.
Figure 14:  Accessing the Ellipsometer tool in the Metrology tool category tree.

Figure 15:  Accessing the Ellipsometer tool from the “Search for a tool” text box field.
Figure 15:  Accessing the Ellipsometer tool from the “Search for a tool” text box field.  

**NOTICE**: If you have more than one active NanoFab project you will need to choose which project to charge your tool activity time to. If you only have one active NanoFab project it will automatically be displayed here with no choice option. Choose the NanoFab project that you want to charge the tool activity to (if applicable).  

Figure 16:  Choosing NanoFab project to charge tool time to (if applicable).
Figure 16:  Choosing NanoFab project to charge tool time to (if applicable).

Click on Start using the Ellipsometer.  

Figure 17:  Enabling the Ellipsometer tool.
Figure 17:  Enabling the Ellipsometer tool.

You have now enabled the Ellipsometer tool on the “Microfludics” NanoFab project. Once you are finished using the tool you will need to disable the tool. To disable the tool click on Stop using the Ellipsometer

Figure 18:  Disabling the Ellipsometer tool.
Figure 18:  Disabling the Ellipsometer tool. 

The Ellipsometer tool has now been disabled and is no longer in use.  

Figure 19:  Confirming Ellipsometer tool is disabled and no longer in use.
Figure 19:  Confirming Ellipsometer tool is disabled and no longer in use.

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VI. Logging in and out of the Cleanroom

**All users must be logged in as a cleanroom user when they are inside the cleanroom**
To log in as a cleanroom user click on Enter the cleanroom.  

Figure 20:  Logging into the cleanroom.
Figure 20:  Logging into the cleanroom.

**Notice** If you have more than one active NanoFab project you will need to choose which project you want to bill your cleanroom access time to. If you only have one active NanoFab project this option will not be available to you. Click on the NanoFab project that you want to bill your cleanroom access time to (if applicable).  

Figure 21: Choosing a NanoFab project to charge cleanroom access time to.
Figure 21:  Choosing a NanoFab project to charge cleanroom access time to.

You are now logged in as a cleanroom user and your NanoFab project will be charged your cleanroom access time. If you have multiple projects and want to confirm which project that you are charging to you can verify this by clicking on Status dashboard and then click Cleanroom occupancy.  When you leave the cleanroom you will need to logout to stop your cleanroom access time charge. Click on Exit the cleanroom.  

Figure 22:  Confirming what project you are charging your cleanroom access time to and exiting the cleanroom. 
Figure 22:  Confirming what project you are charging your cleanroom access time to and exiting the cleanroom.  

You are now logged out as a cleanroom user and your NanoFab project is no longer charged your cleanroom access time.  

Figure 23:  Confirming that you are logged out of the cleanroom.
Figure 23:  Confirming that you are logged out of the cleanroom.

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VII. Posting a Comment

To post a comment first locate the tool that you would like to post a comment on. For this example we will post a comment on the ZEISS FESEM. First access the Tool control screen.  From the Tool control screen, you can either click on the Imaging and Analysis tool category tree to list the tools under that category to locate the ZEISS FESEM or type in the tool name in the “Search for a tool” to locate the tool.  See figures 24 and 25 for examples of each.      

Figure 24: Accessing the Zeiss FESEM tool in the Imaging and Analysis tool category tree.
Figure 24:  Accessing the ZEISS FESEM tool in the Imaging and Analysis tool category tree. 

Figure 25:  Accessing the ZEISS FESEM tool from the “Search for a tool” text box field. 
Figure 25:  Accessing the ZEISS FESEM tool from the “Search for a tool” text box field.  

Click on Post a comment.  

Figure 26:  Accessing posting a comment information box.
Figure 26:  Accessing posting a comment information box.

This information text box will allow you to Post a comment for the ZEISS FESEM. You can determine how many days you want the comment to be displayed. Make sure you leave a detailed comment for informative purposes pertaining to the use of the tool.  

Figure 27:  Selecting days comment is displayed and typing in a detailed comment for informative purposes pertaining to the use of the tool.
Figure 27:  Selecting days comment is displayed and typing in a detailed comment for informative purposes pertaining to the use of the tool.

Once you have completed entering the information for the comment click on Post comment.  

Figure 28:  Posting a comment.
Figure 28:  Posting a comment.

Your comment has been added. You can hide a comment that you added at any time if the comment is no longer appropriate for the usage of the tool and you are the author of the comment.  Click on the message icon to the left of your comment.  The click on Hide this comment

Figure 29:  Hiding a comment. 
Figure 29:  Hiding a comment.  

The comment is now hidden from other users since it is no longer valid for usage of the tool. 

Figure 30:  Confirming comment is hidden.
Figure 30:  Confirming comment is hidden.

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VIII. Reporting Tool Problems

To Report a problem first locate the tool that you would like to report a problem on. For this example we will report a problem on the Wet Etch 1 Tool. First access the Tool control screen.  From the Tool control screen, you can either click on the Wet Chemistry tool category tree to list the tools under that category to locate the Wet Etch 1 or type in the tool name in the “Search for a tool” to locate the tool.  See figures 31 and 32 for examples of each.  

Figure 31:  Accessing the Wet Etch 1 tool in the Wet Chemistry tool category tree.
Figure 31:  Accessing the Wet Etch 1 tool in the Wet Chemistry tool category tree.

Figure 32:  Accessing the Wet Etch 1 tool from the “Search for a tool” text box field. 
Figure 32:  Accessing the Wet Etch 1 tool from the “Search for a tool” text box field.  

Click on Report a problem.  

Figure 33:  Accessing report a problem information box.
Figure 33:  Accessing report a problem information box.

The problem report information text box will allow you to report a problem for the Wet Etch 1. Make sure that you provide a detailed description of the problem in the text box so NanoFab staff can address the problem accordingly. You can choose a problem category that best describes the problem if appropriate. 

NEMO Tutorial, Figure 34:  Choosing problem category if appropriate.
Figure 34:  Choosing problem category if appropriate.

The problem report information box includes check boxes allowing you to either flag this tool problem as a Safety Hazard or Tool Shutdown or both if applicable to the problem report. Once you complete entering in all the appropriate information for the report click on Report problem.  

NEMO Tutorial, Figure 35:  Filling out problem report and submitting report.
Figure 35:  Filling out problem report and submitting report.

Your tool problem report has been logged and the appropriate NanoFab staff has been alerted about the tool problem. If you make a mistake in reporting a tool problem you can cancel the tool problem.  Click on the wrench icon then click on cancel. Doing this will delete the tool problem report for the tool.  

NEMO Tutorial, Figure 36:  Canceling a problem report.Your tool problem report has been deleted.

NEMO Tutorial, Figure 37:  Confirming problem report deleted.
Figure 37:  Confirming problem report deleted.

IX. NanoFab Reservation Rules

  The NanoFab operates on a cost recovery model which endeavors to set the rates for each tool or service  at a level that enables us to cover our costs each year assuming a specific  level of utilization.  In setting the  costs, we assume that each tool user is charged for the total amount of time  that they are preventing others from using the tool.  This time includes, for example, the time  used loading the tool, setting up the tool, etc., as well as the time the tool  has been reserved but is not being used.  In many instances, we use interlocks to prevent the use of tools by  those not previously qualified for their operation, and it is of course  necessary that one be logged into the tool in order to not be prevented from  using it by the interlock.  However, we  stress that our financial model depends on people being logged in for the use  of the tool during the entire period that they are utilizing it, not simply for  the possibly much shorter time that the interlock is enabled.  Please be sure that you log in as soon as you  begin using each tool and log out only after the tool is available for the next  user.

Our reservation policy is  implemented for several reasons, all of which are designed to allow the smooth  and efficient use of the toolset for everyone.  While it is never possible to anticipate every eventuality (particularly  in a research environment!) reservations need to be carefully made and, if  necessary, modified in order to allow others full access to our tool  environment.  Please remember that the actual  time of tool utilization should begin at or shortly after the reservation time  and end shortly before the end of the reservation time.  Reserved time that is not utilized is time that  deprives everyone from the opportunity to use the tools.

The rules below are our  attempt to provide guidelines and enforceable actions to implement the general  policies described above.  More than  anything else, your cooperation in observing these policies will allow us to  maintain and improve your NanoFab.

General NanoFab

  • Users  who enter the cleanroom must log in as a cleanroom user in D101 before  entering.  Logging in as a cleanroom user  from inside of the cleanroom is not allowed.
  • A  reservation on a tool holds that tool for your exclusive use and is a  commitment by you to use the tool for the time you reserved.
  • A  user with a reservation has priority to access a tool at their reserved time.
  • Users  that game or abuse the system will have their reservation privileges suspended  or NanoFab access revoked.

Making a reservation

  • It’s  always a good idea to reserve a tool in advance of your planned usage.
  • If  you plan to run a process that cannot be interrupted, make sure you have a  reservation.  Remember, a user with a  reservation has priority to access a tool at their reserved time.
For  example, you start a 6 hour process without a reservation and another user  makes a reservation that starts 3 hours into your process, you must stop using  the tool when that users arrives.
  • Plan  ahead so you can make a reservation only for the time you need and use the tool  for the time reserved.
    • Underestimating  the time you need can impact your ability to finish your work and the ability  of the next user to start their work.
For example, you make a 60 minute  reservation on an etch tool that requires a chamber clean run after usage.  You show up on time and use the tool for 50  minutes then start a 30 minute chamber clean.  The next user will not be able to start using the tool until 20 minutes  after your reservation ends. 
    • Excessive  reservations limit other users’ access to a tool.  If you find that you will be using the tool  for shorter period than expected, shorten your reservation as soon as you know.
    • Reserve  an additional 30 minutes for any tool that requires configuration to allow time  for the NanoFab staff to setup the tool for you.
For example, you want to use the  sputter tool for 90 minutes and need two targets installed.  Reserve 120 minutes so the staff has time at  the beginning of your usage time to install the targets.
  • Do  not make “place holder” reservations with the intention of canceling them at  the last minute.

Using a reservation

  • Log  in at the beginning of your reservation and log out at the end. 
    • Multiple  log in and log out events during a reservation are not acceptable.
    • If  the tool will be unavailable to other users, you must be logged in.
Examples include tool setup by staff  (target changes, blade changes, aligner filter, etc.), overnight pump downs, etch  or CVD plasma chamber clean runs, leaving your sample in a tool while you go to  lunch, leaving a mask in the stepper or aligner while you develop a wafer,  analyzing test runs, or developing a test pattern on the e-beam before you run  your sample.

For example, if you have a  reservation from 7 pm to 11 am the following day, you cannot log in at 7 pm to  load your sample to pump down overnight, log out at 7:15 pm, then log in at 10  am the next day to perform your process.

For example, if you plan to use the  sputter tool and require targets installed, you must log into the tool while  the targets are being installed because the tool is unavailable to other users  while it is being configured for your use.

For example, if you use a reactive  ion etch tool, you must run a plasma chamber clean after use.  You must stay logged into the tool while the  chamber clean process is running.  Use  the delayed logout function to automatically log out after the clean process is  complete
    • Your  reservation will be canceled the first time you log out of a tool.
For example, if you have a  reservation from 9 am to 4 pm and decide to log out and go to lunch at 1 pm,  your reservation from 1 pm to 4 pm will be automatically canceled and the tool  will be made available to other users.
    • On  tools that require conditioning runs after usage such as etch tool plasma  cleans, a delayed logout will be available so you can start the clean recipe  and log out of the tool.  NEMO will  prompt you for how long to delay the logout.  Enter a time that is sufficient for the clean process to complete.

Arriving Late or Not  Showing Up

  • Always  log in promptly at your reserved start time.
  • If  you arrive more than 30 minutes late, your reservation will be automatically canceled  and your account will be charged 30 minutes of usage at the standard rate.
    • If  the tool is shutdown in NEMO, you will not be charged.
    • Making  short consecutive reservations to avoid late penalties is not allowed.
    • If  you are running late, adjust your reservation or contact the user office so  they can adjust it for you.

Canceling a reservation

  • As  soon as you know your reservation will go unused, cancel it.  If you are off campus, alert the user office  so they can cancel it for you.

Enforcement

  • Reservation  and usage patterns are monitored daily by the staff and monthly metrics are  tracked.  If problems are detected, users  will be notified and action taken according to the following schedule. 
  • Penalties  for abuse or gaming of the system:
    • First  offense - Written warning to user, copy  supervisor.
    • Second  offense
Written warning to user, copy  supervisor and next level supervisor.

Suspend reservation privileges for  two weeks.
    • Third  offense
Written warning to user, copy  supervisor and next level supervisor.

Suspend NanoFab access for two weeks.

User, supervisor, and next level  supervisor meeting with NanoFab Manager.
    • Fourth  offense
Written warning to user, copy  supervisor and next level supervisor.

Suspend NanoFab access for 60 days.

User, supervisor, and next level  supervisor meeting with NanoFab Manager.
 

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