CORAL Name: E-Beam Evap 2
This is an electron gun evaporator for the deposition of metals and dielectrics thin films. Materials available are: Ag, Al, Au, Co, Cr, Cu, Fe, Mo, Pd, Permalloy, Pt, Ta, Ti, W, Al2O3, MgO, Si, SiO2, TiO2.
Specifications / Capabilities:
Scientific Opportunities / Applications:
Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday). Out of hours access requires prior approval by the NanoFab Manager.
Name: Gerard Henein