NIST logo
*

Spin Rinse Dryers: Semitool PSC-101

Description:

These two tools are used for the DI water rinsing and spin-drying of the wafers after RCA cleaning

Specifications / Capabilities:

  • Cassetts for 3, 4, and 6" wafers
  • Programmable recipes for rince, quality rinse, purge, and two dry cycles

Access Information:

Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.

SCHEDULE TRAINING

dryer

Operating Schedule:

Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday).  Out of hours access requires prior approval by the NanoFab Manager.

Contact

Name: Don't Know Yet
Email: nanofab_wetchem@nist.gov
Address:
100 Bureau Drive, Stop 6201
Gaithersburg, MD 20899-6201