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Contact Profilometer: Dektak 6M

Description:

CORAL Name:  Profilometer 1

This system is used to measure step hights by profilometry.

Specifications / Capabilities:

  • Up to 6" wafers
  • Stylus force 1-15mg
  • Tip radius sizes 0.7, 2.5, and 12.5 microns

Scientific Opportunities / Applications:

  • Surface characterization of MEMS, semiconductors and other thin/thick films
  • Vertical measurement range of up to 1mm

Access Information:

Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.

NANOFAB USER MANUAL

SCHEDULE TRAINING

dektak

Operating Schedule:

Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday).  Out of hours access requires prior approval by the NanoFab Manager.

Contact

Name: Chet Knurek
Phone: 301.975.2515
Email: nanofab_metrology@nist.gov
Address:
100 Bureau Drive, Stop 6201
Gaithersburg, MD 20899.6201