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Nanonex Ultra-100

Description:

CORAL Name:  Molecular Vapor Coater

A tool to coat per-fluorinated hydrophobic self-assembled monolayer on mold or other material surfaces in vapors

Specifications / Capabilities:

  • Vapor chemical coating
  • N2 gas purge
  • UV Ozone clean

Scientific Opportunities / Applications:

  • Nanoimprint mold treatment
  • Surface wetting control
  • Surface lubrication
  • Device packaging (moisture barrier)

Access Information:

Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.

SCHEDULE TRAINING

nanonex_ultra100

Operating Schedule:

Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday).  Out of hours access requires prior approval by the NanoFab Manager.

Contact

Name: Don't Know Yet
Email: nanofab_litho@nist.gov
Address:
100 Bureau Drive, Stop 6201
Gaithersburg, MD 20899-6201