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Scanning Electron Microscope 1: Zeiss Ultra-60 FESEM

Description:

CORAL Name:  ZEISS FESEM

High performance research grade field emission SEM for imaging

Specifications / Capabilities:

  • Digital system with full function computer control
  • Airlock
  • Pieceparts to 150 mm wafers
  • Secondary and backscattered electron detectors
  • Images structures down to 10 nm in size
  • Resolution:  1.5 nm at 15 keV
  • Magnification:  10x to 1000kx

Scientific Opportunities / Applications:

  • Measurement and inspection of nanometer level structures
  • Can accomodate substrates from small pieces to 150 mm wafers

Access Information:

Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.

NANOFAB USER MANUAL

OXFORD ENERGY DISPERSIVE SYSTEM MANUAL

SCHEDULE TRAINING

zeiss ultra60 fesem

Operating Schedule:

Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday).  Out of hours access requires prior approval by the NanoFab Manager.

Contact

Name: Mike Hernandez
Phone: 301.975.4590
Email: nanofab_metrology@nist.gov
Address:
100 Bureau Drive, Stop 6201
Gaithersburg, MD 20899-6201