CORAL Name: E-Beam Evap 1
This is a dual e-beam/thermal evaporator for the deposition of metal and dielectric thin films. Materials available are: Ag, Al, Au, Co, Cr, Cu, Fe, Gd, Mo, Ni, Pd, Permalloy, Pt, Ta, Ti, W, Y, Yb, Al2O3, C, MgO, Si, SiO2, TiO2.
Specifications / Capabilities:
Scientific Opportunities / Applications:
Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.
Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday). Out of hours access requires prior approval by the NanoFab Manager.
Name: Gerard Henein