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Critical Point Dryer: Tousimis 916B Series C

Description:

CORAL Name:  Critical Point Dryer

This system utilizes CO2 to dry fragile suspended and floating structures

Specifications / Capabilities:

  • Wafer size up to 6"

Scientific Opportunities / Applications:

  • MEMS drying
  • Membrane drying

Access Information:

Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.

NANOFAB USER MANUAL

SCHEDULE TRAINING

critical_point_dryer

Operating Schedule:

Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday).  Out of hours access requires prior approval by the NanoFab Manager.

Contact

Name: Marc Cangemi
Phone: 301.975.5993
Email: nanofab_postprocess@nist.gov
Address:
100 Bureau Drive, Stop 6201
Gaithersburg, MD 20899-6201