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Oxford FlexALRPT
Description:CORAL Name: Atomic Layer Deposition A tool for alternatively coating single atomic layers layer by layer using saturative surface reactions. Both thermal and/or plasma processes are available. Scientific Opportunities / Applications:
Access Information:Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person. |
 Operating Schedule:Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday). Out of hours access requires prior approval by the NanoFab Manager. Contact
Name: Lei Chen |