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Atomic Force Microscope 1: Veeco Dimension 3100

Description:

CORAL Name:  AFM 1

A tool used to characterize the material surface, nanostructures generated by nanofabrication, nanomanipulation, and nanolithography.  The tool can take samples up to 200mm in diameter and 12mm in thickness.

Specifications / Capabilities:

  • Contact mode, Tapping mode TM, Phase imaging TM
  • Electrostatic force microscopy
  • Magnetic force microscopy
  • Nanomanipulation and nanolithography

Scientific Opportunities / Applications:

  • Surface characterization for thin films
  • Pattern characterization for lithography structures, magnetic media, CD/DVDs
  • Biomaterials, optics and other samples
  • Nanomanipulation and nanolithography using AFM tip

Access Information:

Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.

NANOFAB USER MANUAL

SCHEDULE TRAINING

veeco3100

Operating Schedule:

Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday).  Out of hours access requires prior approval by the NanoFab Manager.

Contact

Name: Chet Knurek
Phone: 301.975.2515
Email: nanofab_metrology@nist.gov
Address:
100 Bureau Drive, Stop 6201
Gaithersburg, MD 20899-6201