The CNST NanoFab at a Glance

A National, Shared-Use Nanofabrication Facility

The NanoFab provides researchers from industry, government, and academia rapid access to a comprehensive suite of tools, and processes for nanofabrication.  This world-class facility is a unique national resource, combining easy access, tool and process development, and training, while providing researchers from across the nation access to NIST-wide expertise in nanoscience, and nanotechnology.

Infrastructure:

• 1,800 m² (19,000 square foot) cleanroom, including 750 m² (8,000 square feet) at class 100

• Over 60 fabrication and processing tools in the cleanroom, including electron beam-, photo- and nanoimprint-lithography, laser writing and mask generation, field emission scanning electron microscopy, metal deposition, plasma etching, chemical vapor deposition, atomic layer deposition, and silicon micro/nano-machining

• Additional tools outside the cleanroom, including a dual beam FIB system and an atomic force microscope

Key Attributes:

• Rapid Access
  The streamlined project application process is designed to get researchers working in the cleanroom in a few weeks.

• Process Support and Development
  The facility is operated by a professional staff of process engineers and technicians with over 180 years of collective experience. The NanoFab offers a broad catalogue of established processes, along with assistance in the development of new processes.

• Training and Education
  The customer-oriented NanoFab staff members are available for expert consultation and hands-on training for all tools and processes.

• Shared Expertise
  As a shared-use facility open to all, the NanoFab brings NIST scientists together with industry, government, and academic researchers from across the spectrum of nanotechnology applications, enabling the rapid exchange of ideas.

For a complete list of NanoFab tools, visit our website at
http://cnst.nist.gov/nanofab/nanofab.html