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Thomas Michels

Thomas Michels is a CNST/TUI Graduate Student Researcher in the Nanofabrication Research Group. He received a B.S. in Microtechnology from University of Gelsenkirchen, Germany and an M.Sc. in Nano- and Microtechnology from the Ilmenau University of Technology. His doctoral research, in collaboration with the CNST, focuses on fabricating self-actuated cantilevers for atomic force microscopy with microcavity optical readout. Thomas is working with Vladimir Aksyuk designing, building, and testing cantilevers that integrate optical detection with electrostatic and thermal actuation. 

Selected Publications:

  • High speed  quasi-monolithic silicon/piezostack SPM scanning sta, E. Guliyev, T. Michels,  B. E. Volland, T. Ivanov, M. Hofer, and I. W. Rangelow, Microelectronic  Engineering 98, 520–523 (2012).
  • Micromachined  self-actuated piezoresistive cantilever for high speed SPM, T. Michels, E.  Guliyev, M. Klukowski, and I. W. Rangelow, Microelectronic Engineering 97,  265–268 (2012).
Staff Photo - Michels


CNST/TUI Graduate Student Researcher
Nanofabrication Research Group


B.S. Microtechnology – University of Gelsenkirchen, Germany

M.Sc. Nano- and Microtechnology – Ilmenau University of Technology, Germany


Phone: 301-975-4196
Email: thomas.michels@nist.gov