Publication Citation (NIST authors in bold)
Authors:	Seiler, D. G., Diebold, A. C., McDonald, R. , Garner, C.M. , Herr, D. , Khosla, R. P., Secula, E. M.
Title:	Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Published:	October 05, 2009
Abstract:
Citation:	Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Publisher:	American Institute of Physics, Melville, NY
Research Area:	Nanoelectronics and Nanoscale Electronics, Semiconductors, Characterization, Nanometrology, and Nanoscale Measurements;