Publication Citation (NIST authors in bold)
Authors:	Kopanski, J. J., McClure, P. , Mancevski, V.
Title:	Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips
Published:	October 05, 2009
Abstract:	The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. Measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show the predicted enhanced spatial resolution.
Conference:	Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Proceedings:	AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Pages:	pp. 212-216
Location:	Albany, NY
Dates:	May 11-14, 2009
Keywords:	carbon nanotube, scanning Kelvin force microscope, SKFM, spatial resolution, work function
Research Area:	Characterization, Nanometrology, and Nanoscale Measurements;