Publication Citation (NIST authors in bold)
Authors:	Martinez, J. V., Obeng, Y. S., Buckley, M. L.
Title:	Semiconductor Microelectronics and Nanoelectronics Programs
Published:	July 13, 2009
Abstract:	The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling repaid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology (NIST), in fulfilling its mission of strengthening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.
Citation:	NIST Interagency/Internal Report (NISTIR) - 7604
Keywords:	critical dimension, linewidth, microelectronics, nanoelectronics, semiconductor, wafer
Research Area:	Nanoelectronics and Nanoscale Electronics, Microelectronics;
PDF version:	Click here to retrieve PDF version of paper (13518 K)