Publication Citation (NIST authors in bold)
Authors:	Geist, J. C., Afridi, M. Y.
Title:	Temperature-Programmed Gas-Sensing With Microhotplates: An Opportunity to Enhance Microelectronic Gas Sensor Metrology
Published:	October 05, 2009
Abstract:	It is only recently that the ITRS (International Technical Roadmap for Semiconductors) has identified functional diversification through heterogeneous integration as a key enabler of future industry growth. This paper describes a powerful temperature programmed gas sensing technique that has the potential to convert low-cost, integrated, microhotplate-based non-selective, metal-oxide gas sensors into stable, sensitive, and highly selective gas sensor systems. The paper also points out the importance of temperature sensor stability to support this technique.
Proceedings:	Frontiers of Characterization and Metrology for Nanoelectronics
Pages:	pp. 207-211
Location:	Albany, NY
Dates:	May 11-15, 2009
Keywords:	MEMS, Microhotplate, Gas sensor, Temperature programming, More than Moore, Heterogeneous integration, Functional Diversification.
Research Area:	Sensors;