Publication Citation (NIST authors in bold)
Authors:	Hurley, D. C., Kopycinska-Mueller, M. , Kos, T. B.
Title:	Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy
Published:	January 31, 2007
Abstract:	We are developing tools that use the atomic force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic force acoustic microscopy (AFAM) involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers our understanding of patterned surfaces, thin films, and nanoscale structures.
Citation:	Jom
Volume:	59
Issue:	1
Pages:	pp. 23-29
Keywords:	atomic force microscopy, mechanical properties, atomic force acoustic microscopy, nanomechanics
Research Area:	Nanotechnology;
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