TY  - JOUR
AU  - John Villarrubia
AU  - Andras Vladar
AU  - Michael Postek
C2  - Surface and Interface Analysis
DA  - 2005-01-01
LA  - en
M1  - 37
PB  - Surface and Interface Analysis
PY  - 2005
TI  - Scanning Electron Microscope Dimensional Metrology using a Model-based Library
ER  -