TY  - SER
AU  - John Villarrubia
C2  - AIP Press, New York, NY
DA  - 2005-01-01
LA  - en
M1  - 788
PB  - AIP Press, New York, NY
PY  - 2005
TI  - Issues in Line Edge and Linewidth Roughness Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822535
ER  -