TY  - SER
AU  - Richard Silver
AU  - Andras Vladar
C2  - McGraw-Hill Professional, New York, NY
DA  - 2005-01-01
LA  - en
PB  - McGraw-Hill Professional, New York, NY
PY  - 2005
TI  - Photomask Metrology, Photomask Fabrication Technology
ER  -