TY  - CONF
AU  - James Potzick
C2  - Bacus News, SPIE
DA  - 1994-01-01
LA  - en
M1  - 10(8)
PB  - Bacus News, SPIE
PY  - 1994
TI  - Photomask Linewidth Measurement Uncertainty: An Alternative Approach via Stepper Emulation
ER  -