TY  - VIDEO
AU  - Andras Vladar
AU  - Michael Postek
C2  - NIST/SEMATECH Proprietary Document
DA  - 1999-12-14
LA  - en
PB  - NIST/SEMATECH Proprietary Document
PY  - 1999
TI  - Final Report, 1998-1999 NIST/SEMATECH Collaboration for Improvement of High-Accuracy Critical-Dimension Meetrology for Semiconductor Manufacturing
ER  -