TY  - VIDEO
AU  - Andras Vladar
AU  - Michael Postek
AU  - John Villarrubia
C2  - Final report to International SEMATECH
DA  - 2003-11-01
LA  - en
PB  - Final report to International SEMATECH
PY  - 2003
TI  - Exploring and Extending the Limits of CD-SEMs' Resolution
ER  -