TY  - JOUR
AU  - Michael Postek
AU  - Andras Vladar
AU  - Marylyn Bennett
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2003-01-01
LA  - en
M1  - 3
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2003
TI  - Photomask Dimensional Metrology in the SEM Part I: Has Anything Really Changed?
ER  -