TY  - VIDEO
AU  - Michael Postek
C2  - NIST/SEMATECH Proprietary Document
DA  - 1997-10-31
LA  - en
PB  - NIST/SEMATECH Proprietary Document
PY  - 1997
TI  - Interim Report, NIST/SEMATECH Collaboration for Improvement of High-Accuracy Critical-Dimension Meetrology for Semiconductor Manufacturing
ER  -