TY  - JOUR
AU  - Hui Zhou
AU  - Joseph Fu
AU  - Richard Silver
C2  - Journal of Physical Chemistry
DA  - 2005-01-01
LA  - en
M1  - 109
PB  - Journal of Physical Chemistry
PY  - 2005
TI  - The Influence of Defects on the Morphology of Si (111) Etched in NHF
ER  -