TY  - VIDEO
AU  - Andras Vladar
AU  - Michael Postek
C2  - NIST/SEMATECH Proprietary Document
DA  - 1998-03-30
LA  - en
PB  - NIST/SEMATECH Proprietary Document
PY  - 1998
TI  - Final Report, 1997-1998 NIST/SEMATECH Collaboration for Improvement of High-Accuracy Critical-dimension Metrology for Semiconductor Manufacturing
ER  -