TY  - JOUR
AU  - Shuhui Kang
AU  - Vivek Prabhu
AU  - B Vogt
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Karen Turnquest
C2  - Polymer
DA  - 2006-06-25
LA  - en
M1  - 47
PB  - Polymer
PY  - 2006
TI  - Effect of Copolymer Composition on Acid Catalyzed Deprotection Reaction Kinetics in Model Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852623
ER  -