TY  - CONF
AU  - Ronald Jones
AU  - T Hu
AU  - Vivek Prabhu
AU  - Christopher Soles
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, TX
PY  - 2003
TI  - Form of Deprotection in Chemically Amplified Resists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852161
ER  -