TY  - JOUR
AU  - Hedden, R
AU  - Lee, Hae-Jeong
AU  - Soles, Christopher
AU  - Bauer, Barry
C2  - Langmuir
DA  - 2004-07-02
LA  - en
M1  - 20
PB  - Langmuir
PY  - 2004
TI  - Characterization of Pore Structure in Nanoporous Low-Dielectric Constant Thin Film by Neutron Porosimetry X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852279
ER  -