TY  - JOUR
AU  - Hyun
AU  - H Peng
AU  - Ken-ich Nihara
AU  - Hae-Jeong Lee
AU  - Eric Lin
AU  - Alamgir Karim
AU  - D Gidley
AU  - Hiropshi Jinai
AU  - Do Yoon
AU  - Christopher Soles
C2  - Advanced Materials
DA  - 2008-04-15
LA  - en
M1  - 20
PB  - Advanced Materials
PY  - 2008
TI  - Self-Sealing Nanoporous Low-k Dielectric Patterns Created by Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852758
ER  -