TY  - CONF
AU  - Deepak Sharma
AU  - Dhananjay Anand
AU  - Ya-Shian Li-Baboud
AU  - James Moyne
C2  - AEC/APC Symposium, Ann Arbor, MI, US
DA  - 2009-09-28 00:09:00
LA  - en
PB  - AEC/APC Symposium, Ann Arbor, MI, US
PY  - 2009
TI  - A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903792
ER  -