TY  - CONF
AU  - Elizabeth Kenyon
AU  - Michael Cresswell
AU  - Heather Patrick
AU  - Thomas Germer
C2  - Proceedings of SPIE Advanced Lithography, San Jose, CA, USA
DA  - 2008-02-25 00:02:00
LA  - en
PB  - Proceedings of SPIE Advanced Lithography, San Jose, CA, USA
PY  - 2008
TI  - Modeling the Effect of Finite Size Gratings on Scatterometry Measurements
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32956
ER  -