TY  - CONF
AU  - Bin Li
AU  - Li Shi
AU  - Paul Ho
AU  - JiPing Zhou
AU  - Richard Allen
AU  - Michael Cresswell
C2  - IEEE ICMTS International Conference on Microelectronic Test Structures, Austin, TX, USA
DA  - 2006-04-01 00:04:00
LA  - en
PB  - IEEE ICMTS International Conference on Microelectronic Test Structures, Austin, TX, USA
PY  - 2006
TI  - Test Structures for Study of Electron Transport in Nickel Silicide Features with Linewidths between 40 nm and 100 nm
ER  -