TY  - CONF
AU  - B Bunday
AU  - M Bishop
AU  - John Villarrubia
AU  - Andras Vladar
C2  - Process and Materials Characterization and Dignostics in IC Manufacturing, Conference | | Process and Materials Characterization and Diagnostics in IC Manufacturing | | | SPIE, Undefined
DA  - 2003-07-01 00:07:00
LA  - en
M1  - 5041
PB  - Process and Materials Characterization and Dignostics in IC Manufacturing, Conference | | Process and Materials Characterization and Diagnostics in IC Manufacturing | | | SPIE, Undefined
PY  - 2003
TI  - CD-SEM Measurement of Line-Edge Roughness Test Patterns for 193-nm Lithography
ER  -