TY - CONF AU - B Newell AU - Michael Postek AU - J VanDerZiel C2 - Proceedings of SPIE, Santa Clara, CA, USA DA - 1995-05-22 00:05:00 LA - en M1 - 2439 PB - Proceedings of SPIE, Santa Clara, CA, USA PY - 1995 TI - Performance of the Prototype NIST SRM 2090A SEM Magnification Standard in a Low-Acclerating Voltage SEM ER -