TY  - JOUR
AU  - F Chien
AU  - W Hsieh
AU  - S Gwo
AU  - Andras Vladar
AU  - John Dagata
C2  - Journal of Applied Physics
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 91 No. 1044
PB  - Journal of Applied Physics
PY  - 2002
TI  - Silicon Nanostructures Fabricated by Scanning Probe Lithography and TMAH Etching
ER  -