TY  - JOUR
AU  - M.A. Perez
AU  - John Kitching
AU  - A Shkel
C2  - Sensors and Actuators A-Physical
DA  - 2008-10-25 00:10:00
LA  - en
M1  - 155
PB  - Sensors and Actuators A-Physical
PY  - 2008
TI  - Design and Demonstration of PECVD Angled Multilayer Dielectric Mirrors Optimized for Micromachined Cavity Sidewalls
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842528
ER  -