TY  - CONF
AU  - Roy Geiss
AU  - David Read
AU  - Glenn Alers
AU  - Rebekah Graham
C2  - Proceedings of Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY, US
DA  - 2009-05-11 00:05:00
DO  - https://doi.org/10.1063/1.3251212
LA  - en
M1  - 1173
PB  - Proceedings of Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY, US
PY  - 2009
TI  - EBSD Analysis of Narrow Damascene Copper Lines
ER  -