TY  - CHAP
AU  - Victor Vartanian
AU  - Richard Allen
AU  - Klaus Humler
AU  - Steve Olsen
AU  - Brian Sapp
AU  - Larry Smith
C2  - Handbook of 3D Integration: Volume 3, Wiley, Malden, MA
DA  - 2014-06-20 00:06:00
DO  - https://doi.org/10.1002/9783527670109.ch29
LA  - en
M1  - 3
PB  - Handbook of 3D Integration: Volume 3, Wiley, Malden, MA
PY  - 2014
TI  - Metrology Needs for 2.5D/3D Interconnect
ER  -