TY  - JOUR
AU  - Weilnboeck Florian
AU  - Nirav Kumar
AU  - Gottlieb Oehrlein
AU  - Ting-Ying Chung
AU  - D Graves
AU  - Mingqi Li
AU  - Eric Hudson
AU  - Eric Benck
C2  - Journal of Vacuum Science and Technology B
DA  - 2012-05-23 00:05:00
DO  - https://doi.org/10.1116/1.3697752
LA  - en
M1  - 30
PB  - Journal of Vacuum Science and Technology B
PY  - 2012
TI  - Real-time measurements of plasma photoresist modifications: The role of plasma vacuum ultraviolet radiation and ions
ER  -