TY  - JOUR
AU  - Brenton Knuffman
AU  - Adam Steele
AU  - Jabez McClelland
C2  - Japanese Journal of Applied Physics
DA  - 2013-07-23 00:07:00
DO  - https://doi.org/10.1063/1.4816248  
LA  - en
M1  - 114
PB  - Japanese Journal of Applied Physics
PY  - 2013
TI  - Cold atomic beam ion source for focused ion beam applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913784
ER  -