TY  - JOUR
AU  - Ronald Dixson
AU  - Richard Allen
AU  - William Guthrie
AU  - Michael Cresswell
C2  - Journal of Vacuum Science and Technology B
DA  - 2005-11-30 00:11:00
LA  - en
M1  - 23
PB  - Journal of Vacuum Science and Technology B
PY  - 2005
TI  - Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32210
ER  -