TY  - CONF
AU  - B Am ende
AU  - Michael Cresswell
AU  - Richard Allen
AU  - T Headley
AU  - William Guthrie
AU  - Loren Linholm
AU  - E. Bogardus
AU  - Christine Murabito
C2  - Proc., 2002 ICMTS, Cork, US
DA  - 2002-04-01 00:04:00
LA  - en
M1  - 15
PB  - Proc., 2002 ICMTS, Cork, US
PY  - 2002
TI  - Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis
ER  -