TY  - CONF
AU  - M Sahiner
AU  - S Novak
AU  - Joseph Woicik
AU  - Y. Takamura
AU  - P Griffin
AU  - J Plummer
C2  - Si Front-End Junction Formation Technologies, Symposium C | | Silicon Front-End Junction Formation Technologies | Materials Research Society, Undefined
DA  - 2003-01-01 00:01:00
LA  - en
M1  - 717
PB  - Si Front-End Junction Formation Technologies, Symposium C | | Silicon Front-End Junction Formation Technologies | Materials Research Society, Undefined
PY  - 2003
TI  - The Local Structure of Antimony in High Dose Antimony Implants in Silicon by XAFS and SIMS
ER  -