TY  - CONF
AU  - James Moyne
AU  - Ya-Shian Li-Baboud
AU  - Xiao Zhu
AU  - Dhananjay Anand
AU  - Sulaiman Hussain
C2  - ISPCS 2008   International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Ann Arbor, MI, US
DA  - 2008-09-22 00:09:00
LA  - en
PB  - ISPCS 2008   International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Ann Arbor, MI, US
PY  - 2008
TI  - Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33160
ER  -