TY  - JOUR
AU  - Wernecke, Jan
AU  - Krumrey, Michael
AU  - Hoell, Armin
AU  - Kline, Regis
AU  - Liu, Hung-Kung
AU  - Wu, Wen-Li
C2  - Journal of Applied Crystallography
DA  - 2014-12-17 00:12:00
LA  - en
PB  - Journal of Applied Crystallography
PY  - 2014
TI  - Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating
ER  -