TY  - CONF
AU  - K Morimoto
AU  - K Morita
AU  - K Ohnaka
AU  - John Dagata
C2  - Fourth International Workshop on Quantum Funtional Devices, Kanazawa, 1, JA
DA  - 2000-11-01 00:11:00
LA  - en
PB  - Fourth International Workshop on Quantum Funtional Devices, Kanazawa, 1, JA
PY  - 2000
TI  - Lateral SiO<sub>x</sub> Tunnel Barrier Formation for Si-Based Tunnel Transistor Using Scanned Probe Oxidation
ER  -