TY  - CONF
AU  - F Chien
AU  - John Dagata
AU  - W Hsieh
AU  - S Gwo
C2  - Proceedings of 5th Conference of Nanoengineering and Microsystem Technology, Industrial Technology Research Institute, Hsinchu, 1, TW
DA  - 2001-11-01 00:11:00
LA  - en
PB  - Proceedings of 5th Conference of Nanoengineering and Microsystem Technology, Industrial Technology Research Institute, Hsinchu, 1, TW
PY  - 2001
TI  - Nanomachining of Si with Si3N4 Masks Patterned by Scanning
ER  -