TY  - CONF
AU  - Huai Huang
AU  - Bin Li
AU  - Qiu Zhao
AU  - Zhiquan Luo
AU  - Jay Im
AU  - Min Kang
AU  - Richard Allen
AU  - Michael Cresswell
AU  - Rui Huang
AU  - Paul Ho
C2  - 10th international workshop on stress-Induced Phenomena in metallization, Austin, TX, US
DA  - 2009-09-18 00:09:00
LA  - en
PB  - 10th international workshop on stress-Induced Phenomena in metallization, Austin, TX, US
PY  - 2009
TI  - Nanoindentation of Si Nanostructures: Buckling and Friction at Nanoscales
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902683
ER  -